Target Mode Transition for Reactive Sputtering ^|^mdash;Effect of Gettering by Chamber Wall^|^mdash;-Reference-Cited by-同舟云学术

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Target Mode Transition for Reactive Sputtering ^|^mdash;Effect of Gettering by Chamber Wall^|^mdash;

Published:2014 Issue:1 Volume:57 Page:1-8
ISSN:1882-2398
Container-title:Journal of the Vacuum Society of Japan
language:en
Short-container-title:J. Vac. Soc. Jpn.

Author:

ABE Yoshio,KAWAMURA Midori,SASAKI Katsutaka

Publisher

The Vacuum Society of Japan

Subject

Spectroscopy,Surfaces and Interfaces,Instrumentation,General Materials Science

Reference51 articles.

1. 1) A. Kinbara: Supattaringu Genshou (Sputtering Phenomena) (Univ. Tokyo Press, Tokyo, 1984) p. 120 [in Japanese].

2. 2) H. Kobayashi: Supatta Hakumaku, Kiso to Ouyou (Sputter Thin Films, Basics and Applications) (Nikkan Kogyo Shinbun, Tokyo, 1993) p. 90 [in Japanese].

3. 3) W. D. Westwood: Sputter Deposition (AVS, New York, 2003) p. 203, p. 260.

4. 4) D. Depla and S. Mahieu: Reactive Sputter Deposition (Springer, Berlin, 2008) p. 1.

5. 5) J. Heller: Thin Solid Films, 17 (1973) 163.

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Leveraging oxide reactive sputtering for thermal insulation in laser-heated diamond anvil cell;High Pressure Research;2024-04-02

2. Dependence of magnetic properties in superparamagnetic Co-granular thin films on deposition rate and effectiveness of a new pulsed DC reactive sputtering method for film fabrication with high deposition rate.;Journal of the Society of Materials Engineering for Resources of Japan;2022-03-15

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