K-M-S (keep-molecules sputtering) deposition of optical MgF2 thin films-Reference-Cited by-同舟云学术

K-M-S (keep-molecules sputtering) deposition of optical MgF2 thin films

Published:1998-12 Issue:4 Volume:51 Page:559-564
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Kawamata K,Shouzu T,Mitamura N

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference7 articles.

1. Oyama, T., Ohsaki, H., Ogata, Y., Watanabe, S. and Shimizu, J., Proceedings of the 3rd International Symposium on Sputtering and Plasma Processes, ISSP'95 Committee, Tokyo, 1995, p. 31

2. Progress in large-area glass coatings by high-rate sputtering

3. Schulz, S. C., 35th Annual Technical Conference Proceedings. Society of Vacuum Coaters, 1992, p. 152

4. Thin films prepared by sputtering MgF2 in an rf planar magnetron

5. Evolution of Optical Thin Films by Sputtering

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