Sputtering Power on the Microstructure and Properties of MgF2 Thin Films Prepared with Magnetron Sputtering

Author:

Changjiang ZHAO1,Chao MA2,Juncheng LIU2,Zhigang LIU3,Yan CHEN3

Affiliation:

1. 1. School of Materials Science and Engineering, TIANGONG University, Tianjin 300387, China;2. State Key Laboratory of Membrane Separation and Membrane Process, Tianjin 300387, China;3. Beijing Institute of Spacecraft System Engineering, Beijing 100086, China;

2. 1. School of Materials Science and Engineering, TIANGONG University, Tianjin 300387, China;2. State Key Laboratory of Membrane Separation and Membrane Process, Tianjin 300387, China;

3. 3. Beijing Institute of Spacecraft System Engineering, Beijing 100086, China;

Publisher

Shanghai Institute of Ceramics

Subject

Inorganic Chemistry,General Materials Science

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