Deposition of TiC films by dual source dc magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference12 articles.
1. Pierson HO. In Handbook of Refractory Carbides and Nitrides Noyes Publications, New Jersey. (1996).
2. Pyrolytic laser-based chemical vapour deposition of TIC coatings
3. Thin TiC x films chemically vapour deposited onto cemented carbides from the TiCl 4 -CCl 4 -H 2 mixture
4. Mechanisms of reactive sputtering of titanium nitride and titanium carbide I: Influence of process parameters on film composition
5. TiC and TiN coatings by reactive sputtering for fusion applications
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