Manufacturing intelligence for reducing false alarm of defect classification by integrating similarity matching approach in CMOS image sensor manufacturing

Author:

Chen Ying-Jen,Fan Chu-Yuan,Chang Kuo-Hao

Funder

Ministry of Science and Technology, Taiwan

VisEra Technologies Company Ltd

Publisher

Elsevier BV

Subject

General Engineering,General Computer Science

Reference31 articles.

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2. Chang, K.-H., Chien, C.-F., & Chen, Y.-J. (2015). Method of defect image classification through integrating image analysis and data mining. US patent No. US9082009 B2.

3. LIBSVM: a library for support vector machines;Chang;ACM Transactions on Intelligent Systems and Technology,2011

4. Feature extraction for defect classification and yield enhancement in color filter and micro-lens manufacturing: An empirical study;Chen;Journal of Industrial and Production Engineering,2013

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