Big data analytics for cycle time related feature selection in the semiconductor wafer fabrication system

Author:

Wang Junliang,Zheng Peng,Zhang JieORCID

Funder

National Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

Publisher

Elsevier BV

Subject

General Engineering,General Computer Science

Reference42 articles.

1. A Markov chain framework for cycle time approximation of toolsets;Akhavan-Tabatabaei;IEEE Transactions on Semiconductor Manufacturing,2012

2. Conditional likelihood maximisation: A unifying framework for information theoretic feature selection;Brown;Journal of Machine Learning Research,2012

3. Effect of upstream re-sequencing in controlling cycle time performance of batch processors;Çerekçi;Computers & Industrial Engineering,2015

4. Highly sensitive inference of time-delayed gene regulation by network deconvolution;Chen;BMC Systems Biology,2014

5. A scheme of high-dimensional key-variable search algorithms for yield improvement;Cheng;IEEE Robotics and Automation Letters,2017

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