Author:
Shin Wooksoo,Kahng Hyungu,Kim Seoung Bum
Funder
National Research Foundation of Korea
Korea Creative Content Agency
Ministry of Culture, Sports and Tourism
Iran Telecommunication Research Center
Ministry of Science, ICT and Future Planning
Subject
General Engineering,General Computer Science
Reference23 articles.
1. Overall Wafer Effectiveness (OWE): A novel industry standard for semiconductor ecosystem as a whole;Chien;Computers and Industrial Engineering,2013
2. Fan, M., Wang, Q., & van der Waal, B. (2017). Wafer defect patterns recognition based on OPTICS and multi-label classification. Proceedings of 2016 IEEE Advanced Information Management, Communicates, Electronic and Automation Control Conference, IMCEC 2016, pp. 912–915, doi: 10.1109/IMCEC.2016.7867343.
3. Optimal automatic control of multistage production processes;Fenner;IEEE Transactions on Semiconductor Manufacturing,2005
4. Deep residual learning for image recognition;He,2016
5. Similarity matching of wafer bin maps for manufacturing intelligence to empower Industry 3.5 for semiconductor manufacturing;Hsu;Computers and Industrial Engineering,2020
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23 articles.
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