Temperature effects on formation of metallic patterns in direct nanoimprint technique—Molecular dynamics simulation and experiment-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Temperature effects on formation of metallic patterns in direct nanoimprint technique—Molecular dynamics simulation and experiment

Published:2009-05 Issue:9 Volume:209 Page:4401-4406
ISSN:0924-0136
Container-title:Journal of Materials Processing Technology
language:en
Short-container-title:Journal of Materials Processing Technology

Author:

Hsiung H.Y.,Chen H.Y.,Sung C.K.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modelling and Simulation,Ceramics and Composites

Reference12 articles.

1. Studies in molecular dynamics, I: General method;Alder;J. Chem. Phys.,1959

2. Studies in molecular dynamics, II: Behavior of a small number of elastic spheres;Alder;J. Chem. Phys.,1960

3. Contact, nanoindentation, and sliding friction;Buldum;Phys. Rev. B,1998

4. Nanoimprint lithography;Chou;J. Vac. Sci. Technol. B,1996

5. Molecular dynamics analysis of temperature effects on nanoindentation measurement;Fang;Mater. Sci. Eng. A,2003

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of mold shape mold vibration and substrate composition in FeNiCrCoMn high entropy alloys nanoimprint;Materials Today Communications;2022-08

2. Molecular Dynamics Investigation of the Deformation Mechanism of Gold with Variations in Mold Profiles during Nanoimprinting;Materials;2021-05-14

3. Atomistic investigation of process parameter variations on material deformation behavior in nanoimprint lithography of gold;Precision Engineering;2020-07

4. Phase transformation of monocrystalline silicon by nanoindentation – Effect of processing temperature;Materials Science in Semiconductor Processing;2019-11

5. Effect of twin boundary on nanoimprint process of bicrystal Al thin film studied by molecular dynamics simulation;Chinese Physics B;2015-02

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3