Effect of twin boundary on nanoimprint process of bicrystal Al thin film studied by molecular dynamics simulation
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1674-1056/24/2/026201/pdf
Reference40 articles.
1. Imprint of sub‐25 nm vias and trenches in polymers
2. Nanoimprint lithography
3. Imprint lithography with sub-10 nm feature size and high throughput
4. Directly patterning metal films by nanoimprint lithography with low-temperature and low-pressure
5. Temperature effects on formation of metallic patterns in direct nanoimprint technique—Molecular dynamics simulation and experiment
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1. Temperature and vibration-assisted effects in nanoimprint gold: An atomistic study;Materials Chemistry and Physics;2022-12
2. Crack propagation mechanism of γ-TiAl alloy with pre-existing twin boundary;Science China Technological Sciences;2019-02-21
3. Confinement-induced nanocrystal alignment of conjugated polymer by the soft-stamped nanoimprint lithography;Chinese Physics B;2015-09-29
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