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AFM tip-based mechanical nanomachining of 3D micro and nano-structures via the control of the scratching trajectory

  • Published:2017-10 Issue: Volume:248 Page:236-248
  • ISSN:0924-0136
  • Container-title:Journal of Materials Processing Technology
  • language:en
  • Short-container-title:Journal of Materials Processing Technology

Author:

Geng Yanquan,Yan Yongda,Brousseau Emmanuel,Sun Yanwen

Funder

Foundation for Innovative Research Groups of the National Natural Science Foundation of China

National Natural Science Foundation of China

Self-Planned Task

Program for New Century Excellent Talents in University

National Program for Support of Top-notch Young Professors

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modelling and Simulation,Ceramics and Composites

Reference22 articles.

1. Atomic force microscope;Binning;Phys. Rev. Lett.,1986

2. The Friction and Lubrication of Solids;Bowden,1950

3. Silicon microlens structures fabricated by scanning-probe gray-scale oxidation;Chen;Opt. Lett.,2005

4. AFM-based 3D nanofabrication using ultrasonic vibration assisted nanomachining;Deng;J. Manuf. Process.,2016

5. Experimental test of blind tip reconstruction for scanning probe microscopy;Dongmo;Ultramicroscopy,2000

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