High aspect ratio channel fabrication with near-infrared laser-induced backside wet etching-Reference-Cited by-同舟云学术

High aspect ratio channel fabrication with near-infrared laser-induced backside wet etching

Published:2020-04 Issue: Volume:278 Page:116505
ISSN:0924-0136
Container-title:Journal of Materials Processing Technology
language:en
Short-container-title:Journal of Materials Processing Technology

Author:

Kwon Kui-Kam,Kim Haan,Kim Taekyum,Chu Chong Nam

Funder

Basic Research Lab Program

MSIT

Ministry of Education

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modelling and Simulation,Ceramics and Composites

Reference26 articles.

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