Micro-structuring of glass with features less than 100μm by electrochemical discharge machining

Author:

Cao Xuan Doan,Kim Bo Hyun,Chu Chong Nam

Publisher

Elsevier BV

Subject

General Engineering

Reference18 articles.

1. Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of Pyrex glass;Xinghua;J Microelectromech Syst,2002

2. Advances in micro ultrasonic assisted lapping of microstructures in hard-brittle materials: a brief review and outlook;Zhang;Int J Mach Tool Manuf,2004

3. Fundamentals of micro fabrication: the science of miniaturization;Madou,2002

4. Addictive process using femto-second laser for manufacturing three-dimensional nano/micro-structures;Yang;Int J Precis Eng Manuf,2007

5. Precision glass machining, drilling and profile cutting by short pulse lasers;Nukumb;Thin Solid Films,2005

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