Morphological characteristics and formation mechanism of latent scratches in chemical mechanical polishing-Reference-Cited by-同舟云学术

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Morphological characteristics and formation mechanism of latent scratches in chemical mechanical polishing

Published:2022-09 Issue: Volume:307 Page:117689
ISSN:0924-0136
Container-title:Journal of Materials Processing Technology
language:en
Short-container-title:Journal of Materials Processing Technology

Author:

Han Xiaolong,Jin Zhuji,Mu Qing,Yan Ying,Zhou Ping

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modeling and Simulation,Ceramics and Composites

Reference25 articles.

1. Wear behavior of the abrasive grains used in optical glass polishing;Belkhir;J. Mater. Process. Technol.,2009

2. Characterization and modeling of pad asperity response in CMP;Boning;Mater. Res. Soc. Symp. Proc.,2010

3. Subsurface damage and polishing compound affect the 355-nm laser damage threshold of fused silica surfaces;Camp,1998

4. A locally relevant wafer-scale model for CMP of silicon dioxide;Castillo-Mejia;J. Electrochem. Soc.,2003

5. Mechano-chemical polishing of silicon wafers;Chen;J. Mater. Process. Technol.,2003

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modeling of surface microtopography evolution in chemical mechanical polishing considering chemical-mechanical synergy;Tribology International;2025-01

2. Investigating the partial plastic formation mechanism of typical scratches on silicon wafers induced by rogue particles during chemical mechanical polishing;Materials Science in Semiconductor Processing;2024-10

3. Polishing performance and material removal mechanism in the solid-phase Fenton reaction based polishing process of SiC wafer using diamond gel disc;Journal of Materials Processing Technology;2024-09

4. Effect of chemical action on shear thickening polishing of YAG;Ceramics International;2024-08

5. Effects of polishing disc material and substrate surface temperature on the tribological behaviors and machining results of β-Ga2O3(100);The International Journal of Advanced Manufacturing Technology;2024-07-26

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