Precise glass microstructuring with laser induced backside wet etching using error-compensating scan path-Reference-Cited by-同舟云学术

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Precise glass microstructuring with laser induced backside wet etching using error-compensating scan path

Published:2021-05 Issue: Volume:291 Page:117046
ISSN:0924-0136
Container-title:Journal of Materials Processing Technology
language:en
Short-container-title:Journal of Materials Processing Technology

Author:

Kwon Kui-Kam,Song Ki Young,Seo Jae Min,Chu Chong Nam,Ahn Sung-Hoon

Funder

National Research Foundation of Korea

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Metals and Alloys,Computer Science Applications,Modelling and Simulation,Ceramics and Composites

Reference26 articles.

1. Micro-structuring of glass with features less than 100 μm by electrochemical discharge machining;Cao;Precis. Eng.,2009

2. Drie of fused silica;Cao;Proc. IEEE Int. Conf. Micro Electro Mech. Syst.,2013

3. Design and applications of MEMS flow sensors: a review;Ejeian;Sensors Actuators, A Phys.,2019

4. Laser etching of glass substrates by 1064 nm laser irradiation;Huang;Appl. Phys. A Mater. Sci. Process.,2008

5. Fabrication and characterization of through-glass vias by the ECDM process;Kannojia;J. Electrochem. Soc.,2019

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2. Comparison of Characteristics of Drilled Holes Using a Gaussian Beam and a Flat-top Beam in Laser Perforation;2024 Photonics & Electromagnetics Research Symposium (PIERS);2024-04-21

3. High-profile-quality microchannels fabricated by UV picosecond laser for microfluidic mixing;Optics & Laser Technology;2024-03

4. Multi-color transparent display based on perovskite quantum dots fabricated by laser-induced plasma etching;Optics Express;2024-01-25

5. Surface Roughness Analysis of Microchannels Featuring Microfluidic Devices Fabricated by Three Different Materials and Methods;Coatings;2023-09-25

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