On the potential-dependent etching of Si(111) in aqueous NH4F solution
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference35 articles.
1. Electrolytic Shaping of Germanium and Silicon
2. Electropolishing Silicon in Hydrofluoric Acid Solutions
3. On the Mechanism of Chemically Etching Germanium and Silicon
4. Anisotropic etching of silicon
5. Fabrication and Characterization of Si Membranes
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