Reactions of atomic deuterium with C2D5Br on Si(100)
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference50 articles.
1. Mechanisms and kinetics of Si atomic‐layer epitaxy on Si(001)2×1 from Si2H6
2. Molecular layer epitaxy of silicon
3. Self-Limiting Adsorption of SiCl2H2and Its Application to the Layer-by-Layer Photochemical Process
4. Adsorption and desorption kinetics for SiH2Cl2 on Si(111) 7×7
5. Growth of Si on Si(100) via H/Cl exchange and the effect of interfacial boron
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