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2. A silicon-silicon nitride membrane fabrication process for smart thermal sensors;Sarro;Sensors and Actuators,1994
3. Pressure sensitivity in anisotropically etched thin diaphragm pressure sensors;Clark;IEEE Trans. Electron Dev.,1979
4. Accelerometers systems with selftestable features;Allen;Sensors and Actuators,1989
5. Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer;van Kampen;Sensors and Actuators,1994