Author:
Sarro P.M.,van Herwaarden A.W.,van der Vlist W.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Integrated thermopile sensors;van Herwaarden;Sensors and Actuators,1990
2. Integrated micromechanical sensors and actuators in silicon;Wollfenbuttel;Mechatronics,1991
3. Micro-calorimeters for (bio)chemical measurements in gases and liquids;van Herwaarden;Proc. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan,7101993
Cited by
44 articles.
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