The effect of grain and pore sizes on the mechanical behavior of thin Al films deposited under different conditions-Reference-Cited by-同舟云学术

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The effect of grain and pore sizes on the mechanical behavior of thin Al films deposited under different conditions

Published:2015-04 Issue: Volume:87 Page:321-331
ISSN:1359-6454
Container-title:Acta Materialia
language:en
Short-container-title:Acta Materialia

Author:

Ben-David E.,Landa M.,Janovská M.,Seiner H.,Gutman O.,Tepper-Faran T.,Shilo D.

Funder

Academy of Sciences of the Czech Republic

Publisher

Elsevier BV

Subject

Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference59 articles.

1. Surface micromachined microelectromechanical ohmic series switch using thin film piezoelectric actuators;Polcawich;IEEE Trans Microwave Theor. Tech.,2007

2. Microsystem Design;Senturia,2001

3. An Introduction to Microelectromechanical Engineering;Maluf,2000

4. The relationships between sputter deposition conditions, grain size, and phase transformation temperatures in NiTi thin films;Kabla;Acta Mater.,2014

5. Influence of deposition conditions on mechanical properties of low-pressure chemical vapor deposited low-stress silicon nitride films;Toivola;J. Appl. Phys.,2003

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