The relationships between sputter deposition conditions, grain size, and phase transformation temperatures in NiTi thin films
Author:
Publisher
Elsevier BV
Subject
Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference38 articles.
1. Thin film shape memory alloy microactuators
2. TiNi-based thin films in MEMS applications: a review
3. Structuring of sputtered superelastic NiTi thin films by photolithography and etching
4. New modelling of the B2 phase and its associated martensitic transformation in the Ti–Ni system
5. Physical metallurgy of Ti–Ni-based shape memory alloys
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3. Influence of polyimide substrates on the composition, morphology, and crystalline nature of sputter-deposited NiTi thin films;Sensors and Actuators A: Physical;2023-08
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