Hydrogen atom-ion synergy in surface lattice modification at sub-threshold energy
Author:
Funder
Euratom research and training program
Publisher
Elsevier BV
Subject
Metals and Alloys,Polymers and Plastics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
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4. Hydrogen-plasma-induced rapid, low-temperature crystallization of μm-thick a-Si: H Films;Zhou;Sci. Rep.,2016
5. Hydrogen in crystalline semiconductors;Chevallier;Annu. Rev. Mater. Sci.,1988
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