Frequency dependence of wake-up and fatigue characteristics in ferroelectric Al0.93B0.07N thin films-Reference-Cited by-同舟云学术

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Frequency dependence of wake-up and fatigue characteristics in ferroelectric Al0.93B0.07N thin films

Published:2024-03 Issue: Volume:266 Page:119678
ISSN:1359-6454
Container-title:Acta Materialia
language:en
Short-container-title:Acta Materialia

Author:

He Fan^ORCID,Zhu Wanlin^ORCID,Hayden John,Casamento Joseph,Tran Quyen^ORCID,Kang Kyuhwe,Song Yiwen,Akkopru-Akgun Betul,Yang Jung In,Tipsawat Pannawit^ORCID,Brennecka Geoff^ORCID,Choi Sukwon,Jackson Thomas N.,Maria Jon-Paul,Trolier-McKinstry Susan^ORCID

Publisher

Elsevier BV

Reference59 articles.

1. Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering;Dubois;Appl. Phys. Lett.,2001

2. Piezoelectric aluminum nitride thin films for microelectromechanical systems;Piazza;MRS Bull.,2012

3. Materials for high temperature acoustic and vibration sensors: a review;Turner;Appl. Acoust.,1994

4. CMOS-integrated aluminum nitride MEMS: a review;Pinto;IEEE J. MEMS,2022

5. Low-temperature growth of piezoelectric AlN film by rf reactive planar magnetron sputtering;Shiosaki;Appl. Phys. Lett.,1980

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1. Coexistence and Interplay of Two Ferroelectric Mechanisms in Zn_1‐xMg_xO;Advanced Materials;2024-08-08

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