Electrochemical Investigation of Chemical Lift-off Lithography on Au and ITO
Author:
Funder
Basic Science Research Program
Korea Government
Publisher
Elsevier BV
Subject
Electrochemistry,General Chemical Engineering
Reference22 articles.
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2. New Approach to Projection-Electron Lithography with Demonstrated 0.1 Mu-M Linewidth;Berger;Appl. Phys. Lett.,1990
3. Soft lithography;Xia;Angew Chem Int Edit,1998
4. Subtractive Patterning via Chemical Lift-Off Lithography;Liao;Science,2012
5. Fabrication of High-Performance Ultrathin In2O3 Film Field-Effect Transistors and Biosensors Using Chemical Lift-Off Lithography;Kim;Acs Nano,2015
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1. Chemical Lift-Off Lithography of Metal and Semiconductor Surfaces;ACS Materials Letters;2019-12-03
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