New approach to projection‐electron lithography with demonstrated 0.1 μm linewidth
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.103969
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1. Electron‐projection microfabrication system
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4. Zur Streuung mittelschneller Elektronen in kleinste Winkel
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