Author:
Thomae R.,Sarstedt M.,Deitinghoff H.,Dehen J.,Firjahn-Andersch A.,Klein H.,Maaser A.,Müller J.,Schempp A.,Weber M.
Reference8 articles.
1. ‘The Physics and Technology of Ion Sources’;Keller,1988
2. The plasma beam ion source
3. Beam measurements on a CHORDIS ion source
4. M. Sarstedt et. al. Proc. EPAC 1992, Editions Front. Gif-sur – Yvettes Cedex, 1708l (1992).
5. RFQ accelerators for ion implantation
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. High duty factor nitrogen RFQ as a prototype high current implanter;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1998-04