Author:
Sakai S.,Tanjyo M.,Matsuda K.,Gotoh Y.,Ohnishi H.,Tsuji H.,Ishikawa J.
Cited by
2 articles.
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1. Secondary electron emission and surface potential of SiO2 film surface by negative ion bombardment;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1998-05
2. The charging mechanism of insulated electrode in negative-ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1995-03