A methodology for analyzing the variability in the performance of a MEMS actuator made from a novel ceramic-Reference-Cited by-同舟云学术

A methodology for analyzing the variability in the performance of a MEMS actuator made from a novel ceramic

Published:2004-10 Issue:2 Volume:116 Page:336-344
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Kong J.S.,Frangopol D.M.,Raulli M.,Maute K.,Saravanan R.A.,Liew L.-A.,Raj R.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Ceramic MEMS—new materials, innovative processing and futuristic applications;Liew;Am. Ceram. Soc. Bull,2001

2. Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer;Liew;Sens. Actuators A,2002

3. Fabrication of SiCN ceramic MEMS using injectable polymer-precursor technique;Liew;Sens. Actuators A,2001

4. Application of microforging in SiCN MEMS structure fabrication;Liu;Sens. Actuators A,2002

5. R. Raj, R. Riedel, G.D. Soraru, in: R. Raj, R. Riedel, G.D. Soraru (Eds.), Special Issue of the J. American Ceramic Society on Ultrahigh Temperature Polymer Derived Ceramics, vol. 84 (10) (2001) pp. 2158–2264.

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