Author:
Liew Li-Anne,Liu Yiping,Luo Ruiling,Cross Tsali,An Linan,Bright Victor M.,Dunn Martin L.,Daily John W.,Raj Rishi
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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4. Fabrication of SiCN ceramic MEMS using injectable polymer precursor technique;Liew;Sens. Actuators,2001
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