Design and characterization of a MEMS piezoelectric acoustic sensor with the enhanced signal-to-noise ratio

Author:

Rahaman Ashiqur,Park Chung Hyuk,Kim Byungki

Funder

Basic Science Research Program

National Research Foundation of Korea

Sabbatical Research Program of the Korea University of Technology and Education

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference48 articles.

1. Monolithic piezoelectric Aluminum Nitride MEMS-CMOS microphone;Segovia-Fernandez;2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS),2017

2. Micromachined piezoelectric microphone with high signal to noise ratio;Wang;Tech. Dig. Transducers 2009, Denver, USA,2009

3. d33 mode piezoelectric diaphragm based acoustic transducer with high sensitivity;Shen;Sens. Actuators A: Phys.,2013

4. A review on piezoelectric energy harvesting: materials, methods, and circuits;Priya;Energy Harvest. Syst.,2019

5. Modeling the power output of piezoelectric energy harvesters;Al Ahmad;J. Electron. Mater.,2011

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