Stability, bifurcation and chaos of a high-speed rub-impact rotor system in MEMS

Author:

Zhang Wen-Ming,Meng Guang

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference22 articles.

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2. IC-processed electrostatic micromotors;Fan;Sens. Actuators,1989

3. An electrostatic lower stator axial-gap polysilicon wobble motor. Part II. Fabrication and performance;Legtenberg;J. Microelectromech. Syst.,1998

4. Operational characteristics of microfabricated electric micromotors;Tavrow;Sens. Actuators A,1992

5. A first functional current excited planar rotational magnetic micromotor;Guckel,1993

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