Micromachined DC contact capacitive switch on low-resistivity silicon substrate-Reference-Cited by-同舟云学术

Micromachined DC contact capacitive switch on low-resistivity silicon substrate

Published:2006-02 Issue:1 Volume:127 Page:24-30
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Yu A.B.,Liu A.Q.,Zhang Q.X.,Alphones A.,Hosseini H.M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. RF MEMS from a device perspective (Topic Reviews);Yao;J. Micromech. Miroeng.,2000

2. J.B. Muldavn, G.M. Rebeiz, High-isolation inductively-tuned X-band MEMS shunt switches, 2000 IEEE MTT-S Int. Microwave Symp. Dig. (2000) 169–172.

3. Monolithically integrated micromachined RF MEMS capacitive switches;Park;Sens. Actuators A: Phys.,2001

4. Improvement of isolation MEMS capacitive switch via membrane planarization;Yu;Sens. Actuators A: Phys.,2005

5. RF–power: driver for electrostatic RF–MEMS devices;Rottenberg;J. Micromech. Microeng.,2004

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Mechanical behavior of a rectangular capacitive micro-plate subjected to an electrostatic load;International Journal of Dynamics and Control;2022-01-08

2. A Switchable Bandpass Filter Employing RF MEMS Switches and Open-Ring Resonators;IEEE Transactions on Electron Devices;2017-08

3. OPTIMIZED MECHANICAL DESIGN OF CAPACITIVE MICROMACHINED SWITCH: A CAD-BASED NEURAL MODEL;Journal of Circuits, Systems and Computers;2014-03

4. CPW Tunable Band-Stop Filter Using Hybrid Resonator and Employing RF MEMS Capacitors;IEEE Transactions on Electron Devices;2013-08

5. Raman spectrum method for characterization of pull-in voltages of graphene capacitive shunt switches;Applied Physics Letters;2012-12-24