A sacrificial-layer-free fabrication technology for MEMS transducer on flexible substrate-Reference-Cited by-同舟云学术

A sacrificial-layer-free fabrication technology for MEMS transducer on flexible substrate

Published:2019-02 Issue: Volume:286 Page:202-210
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Ge Chang,Cretu Edmond

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference20 articles.

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2. Highly flexible piezoelectric mems resonators encapsulated in polymer thin films;Zhang,2018

3. A novel pattern transfer technique for mounting glassy carbon microelectrodes on polymeric flexible substrates;Vomero;J. Micromech. Microeng.,2016

4. Engineering polymer MEMS using combined microfluidic pervaporation and micro-molding;Thuau;Microsyst. Nanoeng.,2018

5. Fabrication of flexible polymer bio-mems with submicron features;Scholten,2017

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