Flexible transparent CMUT arrays for photoacoustic tomography

Abstract

This paper reports the fabrication and characterization of the first flexible transparent capacitive micromachined ultrasound transducer (CMUT) array for through-illumination photoacoustic tomography. Fabricated based on an adhesive wafer bonding technique and a PDMS backfill approach, the array has a maximum transparency of 67% in visible light range and can be bent to a radius of curvature of less than 5 mm without the structural layers being damaged. With a center frequency of 3.5 MHz, 80% fractional bandwidth, and noise equivalent pressure (NEP) of 62 mPa/ H z , the array was successfully used in limited-view photoacoustic tomography of a 100 µm wire target, demonstrating lateral and axial resolutions of 293 µm and 382 µm, respectively, with 46 dB signal-to-noise ratio. Additionally, deep tissue photoacoustic tomography was also demonstrated on a blood tube within a chicken tissue using the fabricated CMUT arrays.