Author:
Zhao Chuming,Knisely Katherine E.,Grosh Karl
Funder
Wright State University Foundation
University of Michigan Center for Organogenesis
University of Michigan MCubed
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference57 articles.
1. K. Grosh, R.J. Littrell, Piezoelectric MEMS microphone, U.S. Patent No. 8896184, 2014.
2. An AlN MEMS piezoelectric microphone for aeroacoustic applications;Williams;J. Microelectromech. Syst.,2012
3. Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers;Wang;J. Microelectromech. Syst.,2003
4. Micromachined piezoelectric membrane acoustic device;Ko;Sens. Actuators A Phys.,2003
5. Resonant capacitive MEMS acoustic emission transducers;Ozevin;Smart Mater. Struct.,2006
Cited by
17 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献