Design and fabrication of a piezoelectric MEMS xylophone transducer with a flexible electrical connection

Author:

Zhao Chuming,Knisely Katherine E.,Grosh Karl

Funder

Wright State University Foundation

University of Michigan Center for Organogenesis

University of Michigan MCubed

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference57 articles.

1. K. Grosh, R.J. Littrell, Piezoelectric MEMS microphone, U.S. Patent No. 8896184, 2014.

2. An AlN MEMS piezoelectric microphone for aeroacoustic applications;Williams;J. Microelectromech. Syst.,2012

3. Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers;Wang;J. Microelectromech. Syst.,2003

4. Micromachined piezoelectric membrane acoustic device;Ko;Sens. Actuators A Phys.,2003

5. Resonant capacitive MEMS acoustic emission transducers;Ozevin;Smart Mater. Struct.,2006

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