Author:
Nawaz Muhammad Haq,Michael Aron,Pota Hemanshu Roy,Chen Ssu-Han,Rasid Syed Mamun R
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference36 articles.
1. Pzt-based piezoelectric mems technology;Smith;J. Am. Ceram. Soc.,2012
2. Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor integration;Ballas,2007
3. Piezoelectric actuators 2004;Uchino;: Proc. Actuator,2004
4. Piezoelectric pzt mems technologies for small-scale robotics and rf applications;Pulskamp;MRS Bull.,2012
5. Pzt thin films for microsensors and actuators: Where do we stand?;Muralt;IEEE Trans. Ultrason., Ferroelectr. Freq. Control,2000
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