Surface-mountable capacitive tactile sensors with flipped CMOS-diaphragm on a flexible and stretchable bus line

Author:

Asano Sho,Muroyama Masanori,Bartley Travis,Kojima Takahiro,Nakayama Takahiro,Yamaguchi Ui,Yamada Hitoshi,Nonomura Yutaka,Hata Yoshiyuki,Funabashi Hirofumi,Tanaka Shuji

Funder

pecial Coordination Funds for Promoting Science and Technology

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Tactile sensing for dexterous in-hand manipulation in robotics—a review;Yousef;Sens. Actuators A: Phys.,2011

2. A survey of tactile human robot interactions;Argall;Rob. Auton. Syst.,2010

3. Tactile sensing—from humans to humanoids;Dahiya;IEEE Trans. Rob.,2010

4. Methods and technologies for the implementation of large-scale robot tactile sensors;Schmitz;IEEE Trans. Rob.,2011

5. Development of soft sensor exterior embedded with multi-axis deformable tactile sensor system;Kadowaki;Proceedings of the 18th IEEE International Symposium on Robot and Human Interactive Communication,2009

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1. Improved Reproducibility of Deflection Control Process for Cantilever‐Type MEMS Tactile Sensors;IEEJ Transactions on Electrical and Electronic Engineering;2024-01-05

2. A Highly Sensitive Flexible Pressure Sensor Based on Inter-Comb Structured Graphene Electrodes;IEEE Transactions on Electron Devices;2023-04

3. Vertical Integration of Force Transmission Structure on Capacitive Cmos-Mems Tactile Force Sensor for Sensitivity Improvement;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

4. Low-Profile Shear Force Tactile Sensor Based on Optical Methods;IEEE Electron Device Letters;2022-07

5. CMOS-Based Tactile Force Sensor: A Review;IEEE Sensors Journal;2021-06-01

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