Electrical characterization of thin-film silicon flexural resonators in linear and nonlinear regimes of motion for integration with electronics-Reference-Cited by-同舟云学术

Electrical characterization of thin-film silicon flexural resonators in linear and nonlinear regimes of motion for integration with electronics

Published:2016-08 Issue: Volume:247 Page:482-493
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Mouro J.,Teagno L.,Gualdino A.,Chu V.^ORCID,Conde J.P.

Funder

Fundação para a Ciência e Tecnologia (FCT)

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference40 articles.

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3. Integrating MEMS and ICs;Fischer;Microsyst. Nanoeng.,2015

4. Technologies for cofabricating MEMS and electronics;Fedder;Proc. IEEE,2008

5. CMOS-MEMS: Advanced Micro and Nanosystems,2005

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