Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators-Reference-Cited by-同舟云学术

Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators

Published:2016-03 Issue: Volume:239 Page:90-101
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Belsito Luca^ORCID,Ferri Matteo,Mancarella Fulvio,Masini Luca,Yan Jize,Seshia Ashwin A.,Soga Kenichi,Roncaglia Alberto

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference33 articles.

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4. The application of computational and experimental-techniques to metal deformation in cold roll forming;Senanayake;J. Mater. Process. Tech.,1994

5. Temperature and strain effect on electrical-resistivity of transition-metal alloys—application to strain-gauges;Brauwers;J. Phys. F Met. Phys.,1976

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