Author:
Nishiyama Kiyohisa,Ward M.C.L.,Al-Dadah Raya
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference9 articles.
1. Microsensors MEMS and Smart Devices;Gardner;LTD,2001
2. Material issues in microelectromechanical devices, science, engineering, manufacturability and reliability;Romig;Acta Mater.,2003
3. Semiconductor Sensors;Kloek,1994
4. Noise in microelectromechanical system resonators;Vig;IEEE Trans. Ultrason., Ferroelectr., Frequency Control,1999
5. Reducing Brownian motion in an electrostatically tunable MEMS laser;Huber;J. Microelectromech. Syst.,2004
Cited by
2 articles.
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