Frequency dependent fluid damping of micro/nano flexural resonators: Experiment, model and analysis

Author:

Zhang Weibin,Turner Kimberly

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Resonant silicon sensors;Stemme;J. Micromech. Microeng.,1991

2. Fluid density sensor based on resonance vibration;Enoksson;Sens. Actuator A,1995

3. Quality factors in micron and submicron thick cantilevers;Yasummura;J. MEMS,2000

4. Real-time mass sensing by nanomechanical resonators in fluid;Ghatkesar;IEEE Sens. Vienna,2004

5. Application of parametric resonance amplification in a single-crystal silicon micro-oscillator based mass sensor;Zhang;Sens. Actuators A: Phys.,2005

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