Nano step height measurement using an optical method-Reference-Cited by-同舟云学术

Nano step height measurement using an optical method

Published:2017-04 Issue: Volume:257 Page:92-97
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wu Junjie,Ding Guoqing,Chen Xin,Han Tao,Cai Xiaoyu,Lei Lihua,Wei Jiasi

Funder

National Key Scientific Instrument and Equipment Development Projects of China

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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5. White-light interferometers with polarizing optics for length measurements with an applicable zero-point detection;Ullmann;Meas. Sci. Technol.,2015

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