1. Ss-DNA functionalized array of AlN contour-mode NEMS resonant sensors with single CMOS multiplexed oscillator for sub-ppb detection of volatile organic chemicals;Rinaldi,2011
2. A variable stiffness PZT actuator having tunable resonant frequencies;Secord;IEEE Trans. Robot.,2010
3. 3-Axis CMOS-MEMS accelerometer with vertically integrated fully-differential sensing electrodes;Tsai,2011
4. Novel, simple, and Q-independent self oscillation loop designed for vibratory MEMS gyroscopes;Eminoglu,2011
5. Electrically coupled MEMS oscillators;Agrawal,2011