Numerical and analytical modelling of holed MEMS resonators

Author:

Civet Y.,Casset F.,Carpentier J.F.,Basrour S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference33 articles.

1. Ss-DNA functionalized array of AlN contour-mode NEMS resonant sensors with single CMOS multiplexed oscillator for sub-ppb detection of volatile organic chemicals;Rinaldi,2011

2. A variable stiffness PZT actuator having tunable resonant frequencies;Secord;IEEE Trans. Robot.,2010

3. 3-Axis CMOS-MEMS accelerometer with vertically integrated fully-differential sensing electrodes;Tsai,2011

4. Novel, simple, and Q-independent self oscillation loop designed for vibratory MEMS gyroscopes;Eminoglu,2011

5. Electrically coupled MEMS oscillators;Agrawal,2011

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1. Analytical modeling of a MEMS beam resonator with release-etch holes;Journal of Micromechanics and Microengineering;2022-07-22

2. Pull-in characteristics of electrically actuated MEMS arches;Mechanism and Machine Theory;2016-04

3. An analytical model for the resonance frequency of square perforated Lamé-mode resonators;Sensors and Actuators B: Chemical;2016-01

4. An analytical model for the determination of resonance frequencies of perforated beams;Journal of Micromechanics and Microengineering;2014-04-01

5. Evaluation of Model ARX For Elastic Masses MEMS Using the Indexes RMSE, AIC, and BIC;Journal of Control, Automation and Electrical Systems;2013-12-24

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