An analytical model for the determination of resonance frequencies of perforated beams
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0960-1317/24/i=5/a=055004/pdf
Reference19 articles.
1. A Compact Squeeze-Film Model Including Inertia, Compressibility, and Rarefaction Effects for Perforated 3-D MEMS Structures
2. Modelling and validation of air damping in perforated gold and silicon MEMS plates
3. Effect of etch holes on quality factor of bulk-mode micromechanical resonators
4. Increased dissipation from distributed etch holes in a lateral breathing mode silicon micromechanical resonator
5. The effect of release-etch holes on the electromechanical behaviour of MEMS structures
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