Design of fully compliant, in-plane rotary, bistable micromechanisms for MEMS applications-Reference-Cited by-同舟云学术

Design of fully compliant, in-plane rotary, bistable micromechanisms for MEMS applications

Published:2007-02 Issue:1 Volume:134 Page:231-238
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Luharuka Rajesh,Hesketh Peter J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Compliant Mechanisms;Howell,2001

2. Millipede—A MEMS-based scanning-probe data-storage system;Eleftheriou;IEEE Trans. Magn.,2003

3. Microfluidics-a review;Gravesen;J. Micromech. Microeng.,1993

4. Microflow devices and systems;Shoji;J. Micromech. Microeng.,1994

5. Design of a novel compliant transmission for secondary microactuators in disk drives;Kim,2002

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