Bistable Rotational SOI Actuator With a Planar Tripod Compliant Suspension-Reference-Cited by-同舟云学术

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Bistable Rotational SOI Actuator With a Planar Tripod Compliant Suspension

Published:2023-10 Issue:10 Volume:7 Page:1-4
ISSN:2475-1472
Container-title:IEEE Sensors Letters
language:
Short-container-title:IEEE Sens. Lett.

Author:

Benjamin Erez¹^ORCID,Maimon Ronen²^ORCID,Krylov Slava¹^ORCID

Affiliation:

1. School of Mechanical Engineering, Faculty of Engineering, Tel Aviv University, Tel Aviv, Israel

2. MANOR A.D.T. Division, Rafael Advanced Defense Systems Ltd., Haifa, Israel

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7782634/10242612/10243135.pdf?arnumber=10243135

Reference34 articles.

1. A new self-test and self-calibration concept for micro-machined gyroscopes

2. MOEMS variable optical attenuators using rotary comb drive actuators

3. Meta-mechanotronics for self-powered computation

4. A new electrostatically actuated rotary three-state DC-contact RF MEMS switch for antenna switch applications

5. Large rotation actuated by in-plane rotary comb-drives with serpentine spring suspension

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