Nonlinear dynamical system of micro-cantilever under combined parametric and forcing excitations in MEMS-Reference-Cited by-同舟云学术

Nonlinear dynamical system of micro-cantilever under combined parametric and forcing excitations in MEMS

Published:2005-04 Issue:2 Volume:119 Page:291-299
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Zhang Wenming,Meng Guang

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference30 articles.

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3. An efficient numerical technique for electromechanical simulation of complicated microelectromechanical structures;Aluru;Sens. Actuators A,1997

4. SESES: a comprehensive MEMS modeling system;Korink,1994

5. Dynamic analysis and control of microcantilevers;Ashhab;Automatica,1999

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