Author:
Gan Zhiyin,Huang Dexiu,Wang Xuefang,Lin Dong,Liu Sheng
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference33 articles.
1. Closed-loop Electromechanical Sigma-delta Microgravity Accelerometers;Kulah,2003
2. A vacuum packaged surface micromachined resonant accelerometer;Seshia;Journal of Microelectromechanical Systems,2002
3. Vacuum packaged single crystal silicon gyroscope with sub mdeg/s//spl radic/Hz resolution;June-Young,2005
4. Vacuum packaged micromachined gyroscope;Anping,2006
5. Mechanical filters—a review of progress;Johnson;IEEE Transactions on Sonics and Ultrasonics,1971
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