Pixel level vacuum packaging for single layer microbolometer detectors with on pixel lens
Author:
Affiliation:
1. Department of Electrical-Electronics Engineering , Adana Alparslan Turkes Science and Technology University , Adana , Turkey , Metu Mems Center , Middle East Technical University , Ankara , Turkey
Abstract
Publisher
Walter de Gruyter GmbH
Link
https://www.sciendo.com/pdf/10.2478/jee-2022-0027
Reference41 articles.
1. [1] Yole Developpement “Thermal Imagers and Detectors”, Market and Technology Report, https://s3.i-micronews.com/uploads/2020/11/YDR20133b-Thermal-Imagers-and-Detectors-2020-Sample.pdf.
2. [2] A. Voshell, N. Dhar, and M. M. Rana, “Materials for microbolometers: vanadium oxide or silicon derivatives”, Image Sensing Technologies: Materials, Devices, Systems, and Applications IV, p. 102090M, 2017, https://doi.org/10.1117/12.2263999.
3. [3] A. Rogalski, P. Martyniuk, and M. Kopytko, “Challenges of small-pixel infrared detectors: A review”, Reports on Progress in Physics, vol. 79, no. 4, p. 46501, 2016, https://doi.org/10.1088/0034-4885/79/4/046501.27007242
4. [4] D. D. Bruyker and B. Xu, “Fabrication of vanadium oxide microbolometers on thin polyimide films”, Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 62–65, 2013, https://doi.org/10.1109/Transducers.2013.6626701.
5. [5] S. K. Ajmera, A. J. Syllaios, G. S. Tyber, M. F. Taylor, and R. E. Hollingsworth, “Amorphous silicon thin-films for uncooled infrared microbolometer sensors”, Infrared Technology and Applications XXXVI, p. 766012, 2010, https://doi.org/10.1117/12.850545.
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