Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. G. Rebeiz, RF MEMS: Theory, Design and Technology, Wiley–Interscience, 2003.
2. Cronos Inc., Multiple User MEMS Processes (PolyMUMPs), http://www.memsrus.com, 2003.
3. MEMS-based variable capacitor for millimeter-wave applications;Feng;Sens. Actuators, A Phys.,2001
4. M.A. Michalicek, V.M. Bright, Flip-chip fabrication of advanced micromirror arrays, in: Proceedings of the 14th IEEE International Conference on Microelectromechanical Systems, 21–25 January 2001, pp. 313–316.
5. N. Hoivik, Y.C. Lee, V.M. Bright, Flip-Chip Variable High-Q MEMS Capacitor for RF Applications, ASME InterPACK’01, Kauai, Hawaii, USA, 8–13 July 2001.
Cited by
13 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献