Power Generation Enhancement with Gap Narrowing by Using a Nested Flip-Chip Assembly in a Millimeter-Sized Microelectromechanical-System Electrostatic Vibrational Energy Harvester
Author:
Affiliation:
1. NTT Device Innovation Center, NTT Corporation
2. NTT Device Technology Laboratories, NTT Corporation
3. NTT Intellectual Property Center, NTT Corporation
Publisher
Japan Institute of Electronics Packaging
Link
https://www.jstage.jst.go.jp/article/jiepeng/7/1/7_65/_pdf
Reference40 articles.
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3. [3] K. Najafi, T. Galchev, E. E. Aktakka, R. L. Peterson, and J. McCullagh, "Microsystems for energy harvesting," Proc. Int. Conf. Solid-State Sensors, Actuators and Microsystems (Transducers), p. 1845, 2011.
4. [4] K. A. Cook-Chennault, N. Thambi, and A. M. Sastry, "Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems," Smart Mater. Struct., Vol. 17, p. 043001, 2008.
5. [5] A. Harb, "Energy harvesting: State-of-the-art.," Renew. Energ., Vol. 36, p. 2641, 2011.
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